CORIAL is a manufacturer of plasma etching and deposition equipment which contributes to innovation in wafer processing for the semiconductor industry. CORIAL addresses a range of end-market applications including MEMS, LEDs & OLEDs, Advanced Packaging, Failure Analysis, and Wireless Devices.
You are exclusively invited to join us at the CORIAL booth #915 to experience our latest technology and product innovations including:
- The new-generation of Corial 210IL system with leading-edge etch processes forhard materials DRIE applied to MEMS, packaging and microfabrication
- COSMA Pulse, the process control software for atomic layer processing using conventional dry etching and PECVD systems
- The Corial 210D, a cost-effective and versatile ICP-CVD system for various R&D projects
- New process data for ICP and PECVD technologies on 200 mm systems
Product Categories
200 Packaging and Assembly Equipment
- Dicing; Sawing; Scribing; Separation Equipment
- Die Removal Equipment
- Printed and Organic Electronic Equipment
207 Process Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
208 Test Equipment
- Failure Analysis Systems
307 Process Materials
- Plasma; Ion Sources
700 Manufacturing Services
- Deposition Service
- Etch; Strip; Cleaning Service
- Failure Analysis and other Analytical Services
901 Printed, Organic, Flexible and Large Area
- Equipment: Systems
904 Electronic Applications
- Energy Efficiency: Energy Harvesting Solutions
- Energy Efficiency: High voltage solutions
- Energy Efficiency: Low Power Electronics
- Energy Efficiency: Power electronics
- Energy Efficiency: Power Supplies and Batteries
- Healthcare: Device Implants
- Healthcare: Flexible Intelligent Devices
- Healthcare: sensors
- Imaging: Camera and Camera Modules
- Imaging: CCD, CMOS and organic sensors
- Imaging: Image Processing, Software and System
- Imaging: Optics and Micromechanic
- Lighting: LED
- Lighting: OLED
- Lighting: PLED
- Security: Biometrics
- Security: Identification
- Security: Tracking, e-ticketing