Exhaust Gas Abatement
CS CLEAN SOLUTIONS® has more than 30 years of experience in the semiconductor industry and is your reliable partner for exhaust gas treatment with a primary focus on dry bed absorption. In addition to the silicon and compound semiconductor industries, we also serve the rapidly-growing photovoltaic and MEMS industries.
Global sales as well as worldwide take-back and disposal services for spent absorber columns guarantee full customer satisfaction. CLEANSORB® dry bed removal of process waste gases, CLEANVENT mini absorbers for gas cabinet vent lines, and CLEAN-PROTECT absorber for emergency gas release. Plasma Conversion System PCS PIRANHA 2000 for removal of perfluorinated compounds (PFC’s) such as CF4, CHF3, SF6, NF3 etc.
CS CLEAN SYSTEMS AG recently launched a customized gas abatement solution for on-site Fluorine Generators dedicated to the Semiconductor and PV industry.
Product Categories
301 Chemicals & Solids
- Cleaning Chemicals; Solvents; Strippers
- Other Specialty Chemicals
500 Factory Monitoring & Control Systems (FMCS)
- Gas Handling - Cabinets; Control; Supply Systems
- Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
501 HVAC, Temperature, Humidity, Contamination Control
- Clean Rooms