EBARA is a global innovator / local provider of vacuum pumps, exhaust management and advanced semiconductor solutions. EBARA’s products are backed by a superior global service and support network. EBARA continues to expand its role by bringing to the market new, high quality field proven products and services: Dry Vacuum Pumps, Turbo Molecular Pumps, Point-of-Use Abatement as well as Chemical Mechanical Polishers, Eless Electroless Plating and Copper Plating Systems.
EBARA’s strengths are proximity to the customer, fast responsiveness, complete service coverage and its full commitment to quality and customer satisfaction. A high product reliability and robustness is also a key to our success and reputation.
Product Categories
200 Packaging and Assembly Equipment
- Device Handling; Feeding Systems
207 Process Equipment
- Bumping Systems
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Environmental Enclosures; Minienvironments
- Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion Implantation Equipment
- Ion; E-Beam Milling Etching Equipment
- Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
- Plating; Electro Chemical Plating; Deposition Systems
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
307 Process Materials
- CMP; Grind; Lap; Polish; Abrasive materials
- Plating Materials
400 Components, Parts & Accessories
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
401 Sub-systems
- Process Monitoring systems
- Pumps, Vacuum
500 Factory Monitoring & Control Systems (FMCS)
- Gas Handling - Cabinets; Control; Supply Systems
- Gas Monitoring Equipment; RGA's; TGO compliance
- Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
700 Manufacturing Services
- Machine Shop; Fabrication Service
- Parts Cleaning; Micro Contamination
- Plating; Electro Polishing; Coating; Surface Treatment
- Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
- Welding; specialty welding services
804 Professional Services
- Personnel Services; Employee Assistance; Recruiters; HR
- Sales; Manufacturers Representation or Distributors