SEMICON West 2016

California NanoSystems Institute at UCLA 

Booth R2

Los Angeles, CA  
      United States

The California NanoSystems Institute (CNSI) serves as a hub of multidisciplinary research in the center of the UCLA campus which brings together leading investigators to produce life-changing socioeconomic impacts. Our mission is to leverage public and private investment for nanoscience research at the interfaces between disciplines, to translate discoveries into knowledge-driven commercial enterprises, and to educate the next generation of scientists and engineers. The Institute’s 190,000 square foot building fosters interdisciplinary team science by leveraging leading-edge facilities and expert services. CNSI’s Core Technology Centers provide fully integrated R&D infrastructure and professional support in the areas of nanofabrication, nanocharacterization and high-throughput screening. CNSI supports entrepreneurship through its Incubator Program, an innovative resource committed to accelerating the transfer of new technologies from the laboratory to the clinical and commercial marketplace. The Incubator Program drives commercialization through a translational pipeline built on training, collaboration and research infrastructure.


Product Categories

203 Inspection & Measurement Products
- Film Thickness; Uniformity Measurement; Ellipsometer
- Instruments; Bench Top Test
- Line Width; Critical Dimension (CD) Measurement
- Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.
- Microscopes: Atomic Force Microscopes (AFM)
- Microscopes: Confocal Scanning; 3-D Video
- Microscopes: Optical Microscopes
- Microscopes: SEM; Focused Ion Beam (FIB), TEM
- Resistivity Measurement; 4 point probe; Sheet resistance

204 MEMS Equipment
- Deep RIE etching; Dry Etching
- Wafer Level Bonders

205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools

207 Process Equipment
- Coat; Develop; Resist Processing; Track Equipment
- Deposition; PVD; Sputtering; Evaporation Equipment
- Epitaxy Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion; E-Beam Milling Etching Equipment
- Lithography/Exposure
- Spin on Glass (SOG); on Dielectric (SOD) Track systems
- Thermal Processing

305 Nanotechnology Materials
- Nanotechnology Materials

308 Substrates
- Compound Semi substrates (GaAs; GaN; InP; SiGe, etc.)

700 Manufacturing Services
- Deposition Service
- Etch; Strip; Cleaning Service
- Lithography; Patterning service
- Measurement; Inspection Service

701 Manufacturing Services or Consulting
- Manufacturing Process Support and Development
- Nanotechnology Intellectual Property Development; Research
- Test Services or Consulting

802 Educational; Research Institutions
- Edu.; Research Inst. (Non Profit); Academia; Schools