SEMICON Europa 2016

Euris GmbH 

Booth 615

Muenchen,   
      Germany

BROOKS Alignment Tools, Wafer Adapters for FOUPs, Pod Opener CORNING TROPEL Non-Contact Optical Metrology DAITRON Edge grinders with integrated polishers, Edge inspection ELECTRONIC CONTAINER Wafer Carriers and Shippers EURIS Single Wafer Shippers EURIS Diamond Scrub Pads, Polishing Pads FORESIGHT Intelligent Chemical & Slurry Management Solutions, Wet Process, Spin Stations, Drying Systems FRT Non-Contact Optical Metrology GL AUTOMATION Wafer Transfer Systems JANDEL 4-Point-Probe Heads, Measurement Systems KENSINGTON Robots, Aligners KOJAIR Lithography Spin Cup Cleaning Systems NAPSON Sheet resistance, Eddy Current, Carrier Lifetime OKAMOTO Grinding, Polishing, CMP, TSV, Ingot machining for Semiconductor and PV ingots PCT SYSTEMS Bath and Megasonic Systems TAU SCIENCE Real-Time in Hotspot and Quantum Efficiency TMC Vibration Control Platforms, Lab Tables, Field Compensation Systems TOUSIMIS CO2 Critical Point Dryers, X-Ray Standards YAMADA Air Operated Pumps, Slurry Pumps

Product Categories

200 Packaging and Assembly Equipment
- Backgrind; Slicing; Lapping; Polishing Equipment
- Cleaning; Washing Equipment for Assembly & Packaging

201 Flat Panel Display Equipment
- Scribe and Break Equipment

202 Other Equipment
- Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
- Vacuum drying & out gassing Systems
- Vibration Isolation Systems

203 Inspection & Measurement Products
- Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
- Flat; Notch Finding System
- Instruments; Bench Top Test
- Resistivity Measurement; 4 point probe; Sheet resistance
- Stress; Refractive Index; Reflectivity & Conductivity Measurement
- Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation

206 PV Equipment
- Inspection and Metrology
- Integration and Automation
- Thin Film
- Wafers

207 Process Equipment
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
- Transfer Systems for Wafer; Reticles or FPD's

208 Test Equipment
- Optical Test Systems

307 Process Materials
- CMP; Grind; Lap; Polish; Abrasive materials

401 Sub-systems
- Pumps, for Fluids
- Pumps, Vacuum

500 Factory Monitoring & Control Systems (FMCS)
- Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
- Chemical; Pure Water; Fluid Monitoring & Control Systems
- Gas Handling - Cabinets; Control; Supply Systems

502 Material Handling Systems
- Robotics; Transfer Systems

901 Printed, Organic, Flexible and Large Area
- Equipment: Inspection

902 Other
- Other