"Welcome to the Thin Film Powerhouse." Home of the BAK Evaporator, Evatec delivers thin film deposition platforms with batch, cluster and "inline" architecture according to customer process and throughput. Visit our booth to hear about the latest developments for our box coaters including new automated handling solutions. The flexible RADIANCE and
CLUSTERLINE® platforms with cluster architecture offer dedicated production solutions on 200 and 300mm formats integrating sputter, PECVD and plasma etch technologies on a single platform in cooperation with plasma deposition and etch specialist Corial SAS. Our SOLARIS "inline" platforms opens up new possibilities for the fully automated fab delivering high speed sputter processing on substrates sizes up to 15inch in chip level EMI shielding, Touch Screen and PV applications. Contact us to learn more about our complete thin film process portfolio for our core markets- Advanced Packaging, Wireless Communication, Power Devices, Optoelectronics, MEMS and HP Optics.
Product Categories
204 MEMS Equipment
- Deep RIE etching; Dry Etching
205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools
206 PV Equipment
- Cells
- Thin Film
207 Process Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
208 Test Equipment
- Failure Analysis Systems
307 Process Materials
- Plasma; Ion Sources
400 Components, Parts & Accessories
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
401 Sub-systems
- Plasma Sources; Controls; Monitoring; Diagnosis