Brooks - The new leader in Semiconductor mass flow. Brooks Instrument is a company of highly trained specialists with service locations world-wide. Our product line is dedicated for the Semi segment. Products like GF, LFC , Xactorr and Solid Sense meet and exceed Semi standards. We work in close cooperation with international end users and are default at most of the global operating OEMs. Brooks Instrument’ portfolio includes Vacuum products – CMX series & CMC series, Thermal Mass Flow – GF series, Pressure Transducers – SSII - and Pressure Switches – IPS/IPT Series. Brooks Instrument GmbH – Your partner for the Semiconductor Industry in the heart of Europe. A dedicated sales team will help you to select the optimal solutions for your measurement or control needs and provide you the optimal services.
Product Categories
201 Flat Panel Display Equipment
- Liquid Crystal Injection or Filling Equipment
202 Other Equipment
- Repair; Rework Equipment
206 PV Equipment
- Thin Film
207 Process Equipment
- Coat; Develop; Resist Processing; Track Equipment
- Crystal Growing & Machining Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion Implantation Equipment
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
400 Components, Parts & Accessories
- Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
- Sensors
401 Sub-systems
- Gas; Liquid delivery panels as subsystems
500 Factory Monitoring & Control Systems (FMCS)
- Gas Handling - Cabinets; Control; Supply Systems
- Gas Monitoring Equipment; RGA's; TGO compliance
- Process Controls