AES motomation provides clean room handling solutions for the semiconductor, flat panel display and solar industry. We offer a variety of atmospheric and vacuum handling robot systems as well as Load Ports. Integrated solutions range from modules such as EFEMs and vacuum transfer chambers up to fully integrated complete handling platforms. Our solutions are based on a wide variety of products which we also customize to exactly meet specific customer requirements.
Our Auto-Teaching solution allows the robot to use a sensor carrier to learn all teach positions within the entire tool independently, requiring no external assistance. This significantly shortens the initial tool set-up time, as well as any down time in the field for re-teaching purposes.
Product Categories
205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools
401 Sub-systems
- Handling; Transfer; Loading Systems; Lifting devices
502 Material Handling Systems
- Robotics; Transfer Systems
701 Manufacturing Services or Consulting
- Automation & Robotics
- Wafer Handling