Trace levels of H2O and O2 impurities are always in UHP process gases and remain in systems from newly installed or replaced UHP plumbing. Continuous monitoring of both impurities is neccesary to control or qualify when lines are ready again or if existing systems are out of specification. It is now possible to monitor H2O and O2 in one unique system.
If your concern is to monitor H2O and O2 below 1 ppbv, reduce cost per measurement, reduce maintenance/drift and calibration costs or a combination of all three, the TGA3000 is the solution.
Ion Mobility Spectrometry (IMS) has been used for years to monitor AMCs in the cleanroom. Our miniaturized UHP IMS cell now brings the simplicity of IMS to process gas monitoring.
In addition to the standard bulk gases: Ar, N2, He, O2, H2, the TGA3000 can be used to monitor SO2 and NH3 in purified CDA. Beta tests are underway to monitor O2 and H2O in purified CO2.
Single or multiple cell options can be integrated into one complete system eliminating the to need to dedicate multiple racks to bulky traditional methods.
Product Categories
203 Inspection & Measurement Products
- Chromatograph
- Spectrometers; FTIR; ATR-FTIR; Auger Electron (AES); SIMS
207 Process Equipment
- Lithography/Exposure
303 Gases
- Analytical Instrumentation Mixtures
- Pure & Bulk Gases
500 Factory Monitoring & Control Systems (FMCS)
- Gas and Other Generation Systems
- Gas Handling - Cabinets; Control; Supply Systems
- Gas Monitoring Equipment; RGA's; TGO compliance
700 Manufacturing Services
- Lithography; Patterning service