SEMICON West 2016

Burkert Fluid Control Systems 

Booth 2233

Charlotte, NC  
      United States

Burkert Fluid Control Systems is a global system solution provider of the most reliable and innovative microfluidic valves, sensors, process valves, pneumatic actuation, controllers and solenoid valves. Burkert Fluid Control Systems provides the following markets custom fluid control systems: medical equipment, biotech, pharmaceutical, food & beverage, water treatment, semiconductor and general industrial processing.


Product Categories

207 Process Equipment
- Plating; Electro Chemical Plating; Deposition Systems
- Thermal Processing

400 Components, Parts & Accessories
- Flow Control: Valves; Meters; Gauges; Regulators; MFC's
- Sensors

401 Sub-systems
- Gas; Liquid delivery panels as subsystems
- Process Monitoring systems
- Temp. Sensing; Control; Recirculators; Chillers; Heat Exch.