SEMICON West 2016

Cast Aluminum Solutions LLC 

Booth 2023

Batavia, IL  
      United States

Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered components for semiconductor equipment OEMs and wafer processors worldwide. We specialize in heating & cooling devices and are a leading supplier of 200/300 mm Platens. Our engineers set us apart, having developed innovative 450 mm designs, devices that provide both heating & cooling, plus many circulation heater innovations. Our PUR-X Circulation Heaters feature replaceable PFA flowpath tubes; these stand up to harsh solvents, and purity is ensured because the tube is replaceable. Our CAST-X HT (high temp) circulation heaters heat liquids & gases to 600°C. We’re often seen as “an extension of our customers engineering team” due to the close relationships we build in developing, testing and manufacturing highly-engineered products. Capabilities include FEA (finite element analysis) thermal & structural modeling, infra-red thermal imaging, x-ray & ultrasound technology, vacuum chamber testing, and more. Our large, modern manufacturing facility features in-house pressurized casting systems, advanced CNC machining & finishing, and cleanroom-isolated electrical assembly.

Product Categories

200 Packaging and Assembly Equipment
- Cleaning; Washing Equipment for Assembly & Packaging
- Hot Embossing System
- Plating; Electro Chemical Plating for device assembly

206 PV Equipment
- Other

207 Process Equipment
- Cleaning; Washing Equipment for Assembly & Packaging
- Deposition; (CVD, PVD, ALD, Plating)
- Deposition; PVD; Sputtering; Evaporation Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Thermal Processing

400 Components, Parts & Accessories
- Bearings; Shaft Collars
- Chucks for Wafer and other Substrates
- Electronic Hardware; Fixtures and Supplies
- Enclosures; Cabinets
- Flow Control: Valves; Meters; Gauges; Regulators; MFC's
- Heating elements and other Furnace components
- Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Fittings

401 Sub-systems
- Gas; Liquid delivery panels as subsystems
- Temp. Sensing; Control; Recirculators; Chillers; Heat Exch.

500 Factory Monitoring & Control Systems (FMCS)
- Chemical; Pure Water; Fluid Handling; Storage; Supply Sys.
- Chemical; Pure Water; Fluid Monitoring & Control Systems
- Gas Handling - Cabinets; Control; Supply Systems

700 Manufacturing Services
- Machine Shop; Fabrication Service
- Micro Machining services (small hole drilling and milling)
- Plating; Electro Polishing; Coating; Surface Treatment
- Welding; specialty welding services

701 Manufacturing Services or Consulting
- CAD; CAM; CIM
- Equip; Hardware; Product Design, Integration and Mfg.
- Manufacturing Process Support and Development

902 Other
- Other