AGS Plasma Systems, Inc.
Transforming Technology into Solutions
Celebrating our 25th Year in Plasma!
PLASMA • ETCH • PVD • PECVD • HDP • CLUSTER
MPS Series - Plasma Etching & Deposition Features
- Modular Design for Ease of Maintenance
- Single or Dual Chamber Batch or Single Substrate
- Small Foot Print
- Stainless Steel or Aluminum Process Chambers
- Cost Effective Process Solution
- Automatic Process Controll using Windows®
Our Modular Process System offers the ultimate machine for thin film research and development through production. Advanced Reactor technologies, such as ICP, RIE, RIE/PE, PECVD and PVD are available as standard modules. Manual load or a variety of vacuum load locks are available.
OEM modules to integrate to your existing system platforms.
Product Categories
204 MEMS Equipment
- Deep RIE etching; Dry Etching
205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools
207 Process Equipment
- Deposition; (CVD, PVD, ALD, Plating)
- Deposition; PVD; Sputtering; Evaporation Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
208 Test Equipment
- Failure Analysis Systems
401 Sub-systems
- Computer; Control; Comms.; Data Acquisition Systems
700 Manufacturing Services
- Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
701 Manufacturing Services or Consulting
- Equip; Hardware; Product Design, Integration and Mfg.