SoftMEMS is the creator of the popular, powerful, easy-to-use CAD tool suites MEMS Pro, MEMS Master and MEMS Xplorer. Software functionalities encompass mixed MEMS/IC schematic capture, simulation, optimization, statistical analysis, full custom mask layout, manufacturing rule verification, 3D model generation and visualization from manufacturing process descriptions, behavioral model creation and links to 3D analysis packages.
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