2019 SVC TechCon

Ionex Corp 

Booth 241

Mansfield, MA  
      United States





Ionex is the first company globally to offer a turn key HDP-magnetron source technology which are application driven, market specific and retrofittable. Ionex’s HDP-magnetron deposition source technology is focused on rate, scalability and superior film properties. Our patented & proprietary HDP-magnetron deposition source is developed in-house from the ground up. The development includes a newly designed high-density plasma generator with proprietary pulsed output and an advanced retrofittable magnetron deposition source far more superior to any conventional magnetron technology in the market today offering high rates, high ionization of sputtered materials with high energy ions with the most stable HDP-discharge ever achieved on a magnetron. This new HDP-magnetron technology offers the industrial market but not limited to a true alternative to Arc deposition due to its high ionization and high deposition rates producing dense, hard and smooth thin films without macro particles. It also enables the stable HDP-deposition of dense, low stress and high rate DLC (hydrogenated/non-hydrogenated) and oxides thin films.





Ionex technology will introduce leaps in new thin film materials in markets including but not limited to Semiconductor, Automotive, Smart Devices, Military, Cutting Tools and Medical Coatings, Decorative Coatings, PVD chrome plating.







Product Categories

Coatings/treatments for specific applications/properties
- Decorative
- Hard coating
- Medical
- Semiconductor
- Tribological

Vacuum/Plasma Systems
- Plasma Deposition
- Plasma Etching
- Sputtering