SVC TechCon 2017

GENCOA - www.gencoa.com

Gencoa provide leading edge components and solutions for the thin film and sputtering industry. The company's key focus is on providing integrated solutions to improve layer properties and production speeds by supplying state-of-the-art magnetron cathodes, process controllers/monitors and plasma pre-treaters. Gencoa also specialize in providing process training, support and implementation on-site at the customers' factory.

For the thin film industry, Gencoa manufacture the following products:

• Optix process gas monitoring system for analysis and process monitoring of PVD/PACVD systems.


• Rectangular planar magnetrons 65, 75, 100, 125, 150, 200, 250 mm wide targets with >40% (high yield magnetics) target use guaranteed for metallic processes. 


• Circular planar magnetrons with target diameter from 2"(50mm) up to 24"(600mm). 


• GRS Rotatable magnetrons with a variety of end blocks for cantilever or drop-in mounting styles. 75 to 152 mm diameter target format.


• A large range of rotatable magnetron magnetic arrays for metal layers, double cathode high rate reactive oxide layers, single and double cathode TCO low resistivity layers.


• Magnetically coupled anodes for high power metallizing and better control over ITO processes.


• Speedflo reactive gas process controllers for high rate oxide layers and precise composition balancing.


• Plasma sources for surface functionalization and deposition of glass, polymer and metal substrates.

Gencoa are not only suppliers of key components, but also a process development partner with a proven record of delivering optimum solutions in the solar, semiconductor and display sectors.

Product Categories

- Adhesion
- Barrier, diffusion, permeation
- Hard coating
- Transparent conductive oxides
- Web coating

- Ion beam

- Gas and gas mixtures
- Optical emission spectroscopy

- Optical emission spectroscopy

- Sputtering