FHR Anlagenbau GmbH specialises in developing innovative thin-film technologies and plants, as well as providing services in the field of thin-film technology. Founded in 1991, the company is based in Ottendorf-Okrilla and has been part of centrotherm photovoltaics AG since 2008.
Its main operating area is constructing machines for vapour deposition, sputter coating and CVD and ALD technologies for industry and research. These units are used in various branches of industry such as photovoltaics (especially CIGS and organic PV cells), solar thermal energy, optics, electronics and sensor technology and the automotive industry. The company's portfolio includes modular cluster systems for coating stationary substrates, inline units with glass plates to be coated aligned vertically or horizontally, and roll-to-roll systems for coating flexible substrates such as metal foil or polymer films.
FHR works alongside well-known partners in industry and research institutions around the world, taking on a particularly leading position on the market in the case of roll-to-roll vacuum deposition.
Apart from plant construction, FHR also has a department for the construction of planar and rotating tubular sputtering targets and a strongly performing service division.
Product Categories
- Atomic layer deposition (ALD)
- Chemical vapor deposition
- Evaporation
- Large area
- PECVD
- Plasma Cleaning
- Plasma Etching
- Sputtering
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