VACUUM VALVES

Aluminum Valves With Aluminum Conflat Flanges: Aluminum Gate Valves mate directly to stainless steel CF flanges.  2.75 to 14 inch O.D.  Throttle and open/close actuation.

Gate Valves, Mild Steel, Stainless & Aluminum From 2" to 36" (63 to 900 mm): ANSI, ISO, and JIS Flanges. Bellows or O-Rings stem seal. Metal gasket or elastomer bonnet seal. Million cycle life.

Electric Motor Actuated Gate Valves: No air needed. 115 or 220V, 50/60 Hz.  Port sizes from 50 mm to 500 mm, 2 to 20 inch.  ANSI, ISO, NW, or JIS Flanges.

Angle Valves: Mild Steel, Stainless and Aluminum: NW-16 to 32" ANSI, ISO and JIS Flanges.

Throttlemaster™ Valves: Isolation and throttling in a single valve from 2 to 20 inch ANSI and 63 to 600 mm ISO.

Rectangular Port Aluminum Valves: For wafers to 300 mm and flat panel displays. Port sizes up to 6 inch X 52 inch (150 X 1300 mm).

 

VACUUM GAUGES

Wide Range Diaphragm Manometer: 10^-5 to 1000 Torr.  Designed for CVD and other pump-out and backfill applications. mbar and Pascal available.

Convection Gauges: 10^-3 Torr to atmosphere. Linear analog outputs.

Vacuum Switches: ±2 mTorr from 1 to 2000 mTorr; ±1 Torr from 2 to 1500 Torr.

Active Pirani Gauges: with linear 0 to 10 V and 4 to 20 mA outputs. $289.

 

VACUUM PUMPS & EQUIPMENT

Oil Sealed Rotary Vane Pumps: 50 to 1800 l/min.; 3 to 108 ^m3/hr.; 1.8 to 64 cfm.

Soft Start Pumps – Pump Pressure Control: Max Pumpdown then slows and maintains desired vacuum setting.

Rotary And Push/Pull In One Feed Through: Shaft diameters from 1/4 to 5/8 inch NW, CF, and pipe thread system connection.

 

Throttlemaster is a trademark of Vacuum Research. Conflat is a registered trademark of Agilent.

 

Product Categories

- Chambers
- Feedthroughs
- Gauges
- Motion (includes Robotics)
- Pump, mechanical
- Pumps, roughing
- Valves

- Capacitance manometer
- Thermocouple