k-Space Associates, Inc. is a leading manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries. Our tools are used for monitoring most thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation. Incorporated in 1992 and driven to supply the best technical support in the industry, our tools are used worldwide in both research and full production monitoring of semiconductor, PV, and thin-film deposition, annealing, and processing applications.
kSA MOS technology can easily detect changes to radius of curvature resolution in the 20-50 km range; powerful enough to detect the stress induced by a single monolayer of material deposited on the substrate surface. By using an array of laser beams, the kSA MOS yields dynamic curvature and stress over the sample in two orthogonal directions simultaneously as a function of time or temperature. These real-time measurements can be used for growth opitimization and process control.
In addition to being able to monitor film stress with kSA MOS, RHEED (Reflective High Energy Electron Diffraction) data acquisition and analysis is easily obtained using the kSA 400. This package includes a high resolution camera, light tight flange mount to mount onto your chamber port, and the powerful kSA 400 software and RHEED image library. kSA 400 provides real-time film growth information such as growth rate, surface structure and texture, and lattice spacing/strain.
Recent advancement in RHEED guns with differential pumping has allowed RHEED to penetrate higher pressure deposition technologies that were previously off limits. By supplying a variety of high performance lenses, the kSA 400 can be customized for various chamber geometries and can best analyze the smaller size RHEED images generated in higher pressure deposition chambers.
At k-Space we take pride in providing the best support in the industry. No automated queues, no slow response times. When you call, you’ll always get a friendly k-Space team member to direct your call to the appropriate person. Contact us today to discuss your metrology needs.
k-Space Associates, Inc.
2182 Bishop Circle East, Dexter, MI 48130 USA
tel: (734) 426-7977
fax: (734) 426-7955
email: requestinfo@k-space.com
website: www.k-space.com
Product Categories
Analytical/Testing
- Coating characterization, physical properties
Process Monitoring and Control
- Deposition rate monitors/controllers
Testing/metrology
- Reflection
- Solar absorption
- Thickness