Korvus Technology sells and manufactures the HEX benchtop thin film deposition system. The HEX platform offers an un-matched level of user control and customization, designed to incorporate the latest thin film technologies and performance into a bench top platform. It can be operated both manually and automatically with a huge range of sources and system options including rotating sample stages, ebeam evaporation, DC and RF sputter deposition, thermal evaporation, QCM and organic evaporation. Its modularity and ease of use make it the ideal tool for clean rooms and training programs.
Design
The HEX has been developed with student training in mind. Its modular construction allows various key elements to be exposed, discussed and interacted with, enabling student laboratories to fully explore the mechanical, material and growth elements of thin film research and nanomaterials.
The HEX's ability to be quickly reconfigured at low additional expense allows it to provide easy training on a reproducible and recognizable platform for various deposition/coating techniques ranging from sample preparation for surface analysis to e-beam, sputtering, thermal, organics (for OLED research) and a range of other thin film deposition techniques.
The HEX is a compact and highly flexible deposition system which allows the user complete freedom to reconfigure the system to suit their current experiemental needs or for a future change of direction. The system can be purchased at the most basic level and later upgraded to a sophisticated deposition and analysis tool as funds allow. All upgrades are designed to be simple for users to implement, cutting down on unnecessary installation expense.
The frame supports 6 interchangeable panels, which can be easily swapped around to achieve the desired system configuration. Depending on the type of the panel, it may serve as, a chamber wall (blank panel), viewport panel, deposition source panel and a QCM panel. The panels can be mounted onto the frame in a matter of minutes, which saves a considerable amount of time when performing maintenance procedures or reconfiguring the system.
Applications
Typical applications for the HEX deposition system include sample preparation, R & D development of new coatings, Electrical contacts, Sputter deposition, Teaching/training and Lift-off.
Product Categories
Analytical/Testing
- Analytical instrumentation
Vacuum/Plasma Systems
- Atomic layer deposition (ALD)
- Evaporation
- Sputtering
Vaporization Sources
- Electron beam evaporation
- Sputtering
- Thermal evaporation, resistive