Nova Fabrica Ltd. are a manufacturer and a worldwide supplier of PVD process components and materials. Nova Fabrica offer comprehensive solutions in the following categories:
- PLASMA EMISSION MONITORING
- OPTICAL EMISSION SPECTROMETRY
- RUGGED FIBER OPTICAL COMPONENTS
- REACTIVE GAS CONTROL
- PVD MATERIALS
- ROTATABLE CATHODES
- POWER SUPPLIES
Nova Fabrica product portfolio includes:
- FloTron™ - Economy Multi-channel Process Control and Plasma Monitoring System.
- FloTron™ X - Multi-channel Process Control and Broadband (spectroscopic, 190 - 1040 nm) Plasma Monitoring System.
- FloTron™ H (Hybrid) - Multi-channel Process Control featuring Voltage Control, Broadband and Single-Wavelength Plasma Emission Monitoring in a single unit.
- FloTron™ X HR - High-resolution Broadband (spectroscopic, 190 - 1040 nm) Plasma Emission Monitoring System with Multi-channel Process Control.
- FloTron™ systems are perfect tools for process control, analysis and optimisation (e.g. reactive sputtering, co-sputtering, end-point detection, quality control, fault detection). FloTron™ systems can be packaged with dedicated software for easy OES spectral data identification and analysis.
- Optical Assemblies - for Plasma Emission Monitoring (OES) of PAPVD, PECVD AND PEALD. Rugged, reliable, with coating protection and lower overall cost; proven in the field.
- PVD materials - sputtering targets, tablets, granules, etc.
- Rotatable Magnetrons - economy highly reliable rotary end-blocks and sputtering cathode systems.
- Power supplies - for sputtering cathodes, ion beams, substrate bias, atmospheric plasma, & OLED heaters.
The comprehensive product range allows Nova Fabrica to offer tailored and competitively priced package solutions with appropriate technical and field support.
Product Categories
Deposition Rate Monitoring/Control
- Optical emission spectroscopy
Mass Flow Measurement/Control
- Optical Emission Spectrometry
Plasma Diagnositics
- Optical Emission Spectrometry
Power Supplies
- Pulsed power, bipolar
- Pulsed power, DC
Process Monitoring and Control
- Gas and gas mixtures
- Optical emission spectroscopy
Vacuum Components
- Feedthroughs
Vaporization Materials
- Sputtering targets
Vaporization Sources
- Sputtering