SEMICON Korea 2019

Sessions Speakers Exhibitors Products Press Releases Floor Plan

AMETEK Korea Co., Ltd. 

CAMECA - AKONIS

In-line, fully-automated SIMS tool providing on-the-fly composition measurements directly in the semiconductor fab lines. - Epitaxial (SiGe, SiP) & implant process monitoring - Blanket & patterned wafer analysis in pad down to 35µm - SEMI compliant