SEMICON Korea 2019
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Keun
Hee Bai
Keun Hee Bai
Dr / Principal engineer
Samsung Electronics (invited)
Keun Hee, Bai, Ph.D. has been principal engineer at Samsung electronics since 2002 with responsibility on developing etch process, plasma physics and developing devices. Recently he is working lots of things related to the EUV and he is responsible for whole EUV etching in his company. Dr. Bai is committee member of the SPIE_Advanced etch and also worked in the KIPO (Korea Intellectual Property office) from 2009 ~ 2011 as an examiner. Dr. Bai received a Ph.D degree in plasma physics from KAIST, Daejeon, Korea. Dr. Bai likes to play basketball and tennis.
Sessions :
S4. Plasma Science and Etching Technology
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