SEMICON Korea 2019
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Su
Min Kim
Su Min Kim
EUV Resist Materials Development for Overcoming Stochastic Limitation
Samsung Electronics
2010.03.01~ : Photoresist development, Samsung Electronics 2006.03~2010.02.28 : Ph. D., Chemistry, Korea Advanced Institute of Science and Technology(KAIST) 2004.03~2006.02 : M.S. , Chemistry, Korea Advanced Institute of Science and Technology(KAIST) 2000.03.~ 2004.02 : B.S. , Chemistry, Ewha Womans University
Sessions :
S1. Advanced Lithography
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