SEMICON Korea 2019

Hiroki Kawada
Senior Engineer
Hitachi High-Technologies


Hiroki Kawada has been Senior Engineer at Hitachi High-Technologies for 18 years with R&D of advanced metrology using CD-SEM. Recently, he works on in-line metrology of edge-roughness and wiggling occurring in EUV-lithography and/or mandrel processed device-features. Prior to joining Hitachi High-Technologies, Kawada was Senior Researcher for Hitachi Ltd. During his 15 years at Hitachi Ltd., Kawada spent time for R&D of molecular beam epitaxy technique. From 1993 to 1994 he was in Fritz-Haber-Institut-der-Max-Planck-Gesellschaft at Berlin, Germany, to study adsorption on aluminum surface. Kawada received a Master of degree in material science from Tokyo Institute of Technology, Tokyo, Japan.

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