SEMICON Korea 2019

Hyoungcheol Kwon
Tech Leader (Senior Engineer)
SK hynix


Hyoungcheol Kwon, Ph.D. has been Tech Leader of Integration TCAD team at SK Hynix since 2013 with responsibility of plasma unit process (etch/deposition) modeling and finding solutions for productivity enhancement in DRAM and 3D NAND. He is an expert in plasma etch profile analysis and RCP (such as frequency, power, temperature, and gas imxture) optimization using the extended effective frequency concept developed by himself. He is currently leading a group of engineers working on unit process profile & damage analysis and optimized RCP & Layout concept design. Dr. Kwon received a Ph.D. degree in Electrical Engineering from POSTECH, Pohang, S. Korea (2013). He studied electron & ion kinetics in low temperature plasmas for various operating pressures (few mTorr ~ atmospheric pressure). His thesis title is "Investigation of Electron Kinetics in Atmospheric-Pressure Microplasmas through Particle-in-Cell Simulation"

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