SEMICON Korea 2019

Hye-Keun Oh
Professor
Hanyang University


“Hye-Keun Oh”, Ph.D. has been a professor of Applied Physics Department at Hanyang University since 1991. He has been a lithographer, whose interest in in industrial lithography even though he stays at academia. He is currently focused on EUV pellicle and computational lithography. Prior to joining Hanyang University, he was a senior engineer for Hyundai Electronics for 2 years doing e-beam and phase shift mask. ”Oh” received a Ph. D. degree in physics from Indiana University, Bloomington, IN, USA and BS in physics education from Seoul National University.

Sessions :