SEMICON Korea 2019

Rich Wise
Managing Director, Patterning
Lam Research


Rich Wise, PhD is responsible for patterning strategic projects in the Advanced Technology Development group of the Lam Research CTO office. At Lam Research Dr. Wise is responsible for Lam’s new products supporting EUV and multi-patterning for both logic and memory applications. Prior to joining Lam Research in 2014, Rich held the appointment of Distinguished Engineer responsible for plasma based patterning solutions in the IBM Semiconductor Research and Development Center in Fishkill, New York. At IBM Rich was responsible for plasma based etch process development of advanced memory and logic technologies and plasma etch equipment selection for the IBM Corporation and its technology development alliances. Rich received his PhD in Chemical Engineering from the University of Houston for his research on inductively coupled non-equilibrium plasmas using numerical simulations and optical spectroscopy techniques. Rich holds over 100 patents in the field of plasma based processing and related semiconductor technologies and serves as committee co-chair for the SPIE nanolithography conference.

Sessions :