SEMICON Korea 2019

Sean Barry
Professor
Carleton University (invited)


Seán Barry is a Professor at Carleton University, Ottawa, Canada), where he works on precursor compounds for atomic layer deposition (ALD). He started in Carleton University in 2003 working on guanidinates of the group 13 metals (Al, Ga, In), and has recently studied the coinage metals (Cu, Ag, Au) for depositing thin films of these metals. He is also the director of the Facility for Nanoscience, Surfaces, and Sensor Interfaces (FANSSI), a cleanroom facility to study surface chemistry and ALD. He has served as a scientific advisor for the AVS ALD, Baltic ALD and EuroCVD meetings, and is presently a co-organiser of the joint EuroCVD/Baltic ALD meeting in Linköping, Sweden in 2017. In 2012, he was awarded a Marie Curie Fellowship as part of the EU-funded European Research Training Network ENHANCE to undertake metal ALD at the University of Helsinki, and in 2015 he was awarded a $295k Vinnova VINNMER Mobility grant to undertake CVD/ALD research in Sweden.

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