SEMICON Korea 2018
Tweet
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Speakers
Gon-Ho
Kim
Gon-Ho Kim
Professor
Seoul National University
Gon-Ho Kim, Ph.D. has been professor at Seoul National University since 2003, interesting in the development concept of plasma monitoring technique and also characterization of ICP and CCP for etch and deposition processes. Prior to joining SNU, Kim was Associated Professor for Applied Physics at Hanyang University for 1995-2002. During his 8 years at HYU, Kim spent time constructing large area ICP source for 5 gen. LCD etcher and development of various electrical plasma diagnostic tool including VI and OES. Kim received a Ph.D. in Plasma Engineering field from University of Wisconsin-Madison, WI, USA and Post Doc for 2 years in Center for Plasma Aided Manufacturing. During those times, developing ECR etcher and process optimization.
Sessions :
S4. Plasma Science and Etching Technology
Home
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Tweet
Login
|
Back to top
ChirpE