ST10: Design Considerations for a Multiple Element MEMS Gas Sensor
(Room Theater 1)
17 Oct 18
1:00 PM
-
1:50 PM
Collin Twanow - Vice President of Technology, Micralyne Inc. — MEMS technology has enabled size, cost, and power reduction for metal oxide gas sensors. The small size of MEMS devices combined with a wide selection of gas sensitive semiconductor materials, allows for multiple sensing elements to achieve improved detection and selectivity of real-world gas mixtures. Design choices must be made for optimizing size, circuit complexity, gas selectivity, and power consumption. This session provides a detailed look at these options and provide device examples.