Electron beam irradiation is a well-accepted method for sterilization of medical products. Usually this is done with high electron energies up to 10 MeV in specialized service facilities. Because of high energy these facilities need a high shielding and have very high costs. One aim of Fraunhofer FEP is to develop small in-line capable systems based on low-energy electron irradiation (LEEI) with energies in the range of 0.1-0.3 MeV. The drawback is that the penetration depth of low energy electrons is very small (up to 300 µm). For some applications this is sufficient, but so far not applicable to liquids. During the last years we developed together with other Fraunhofer Institutes and partners different technologies with which we are now able to produce thin liquid films for LEEItreatment. So the beneficial effects of electron irradiation over other treatment technologies can be used in small and compact facilities. It is well known that electron irradiation lead to much shorter treatment times compared to gamma irradiation because of very high dose rates. This could be beneficial, for example, for the inactivation of pathogen solutions for the production of very effective vaccines. The technology and first results will be presented.