Semiconductor High Purity Water System and Piping Design
(Room 129 A)
02 Nov 16
8:30 AM
-
9:45 AM
Tracks:
Codes and Advanced Design
The requirement for high-purity water is a common demand that spans various industries including biotechnology, pharmaceuticals, manufacturing facilities, research laboratories, semiconductor manufacturers, food processing/bottling plants, and higher education institutions. With a diverse range of applications and so many different water quality standards in use, it can be a real challenge for engineers to design the optimal system for each application. This presentation will focus on designing a high-purity water system from the ground up, with specific focus given to the semiconductor industry, which has some of the highest water quality requirements. The presentation will open by defining the major water quality standards and where these different standards are applied. It will then shift to how each of the different technologies that are common to these systems works toward achieving the required water standard. Topics will include pretreatment and reverse osmosis systems, deionization, electro-deionization, ultraviolet radiation, sanitization, ozonization, piping selection, and filtration. How the system interacts with the plumbing loop and different loop designs will also be discussed. This presentation will offer these details in the context of an in-depth review of two case studies for both a cleanroom/lab-scale system and a manufacturing facility to highlight real-world applicability and design.