Tracks: 2018FLEX Full Conference, Manufacturing on Flex
The dominant technology for replacement of ITO involves the deposition or printing of a grid pattern onto a film or glass substrate. Grid-based benefits include higher throughput, lower cost and improved functionality. Conventional inspection technologies often “subtract” the grid from the image and detect defects in the non-grid area. This means that critical defects in the grid can go undetected. Dark Field has developed special optics which allow the inspection system to optically ignore the grid. This means that the system detects ALL the defects whcther they lie on the grid or between the grid patterns. It also means that the inspection system does not have to “learn” the grid. Special Solid State Laser Reflection (SSLR) technology has been developed which has been proven to detect defects on glass and film in the presence of grids ranging from 5μm - 10μm thick. This paper will describe the technology and give application examples.