2019 SVC TechCon

Advanced Ion Source Dose Measurement with the Telemark Ion Current Monitor (Room Promenade Lobby)

01 May 19
2:00 PM - 2:10 PM

Tracks: Vendor Innovator Showcase

Speaker(s): Joshua Gurian, Telemark

The Telemark Ion Current Monitor (ICM) provides real-time ion current density monitoring throughout ion assisted deposition processes.  Using a novel mesh-grid based Faraday cup design, the Telemark ICM provides precise ion flux measurement even during dielectric coating deposition and requires minimal maintenance and no consumable parts.  Here we will show how the Telemark ICM can be used to quickly dial in an ion assisted coating process or to monitor a sensitive coating for precise process control.  We will also demonstrate how the Telemark ICM can be directly integrated with the newly released line of Telemark Ion Source Power Supplies.