HIPIMS Deposition of Advanced DLC Coatings for Sensor and Tribological Applications
(Room Room 104-A)
01 May 19
11:40 AM
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12:00 PM
Tracks:
High Power Impulse Magnetron Sputtering – HIPIMS
Diamond-like carbon (DLC) films are well established in tribological applications. Besides the excellent friction and wear properties, electrical properties of DLC are studied, e.g. for the use as strain sensor. While the industrial use of DLC is widespread, there is still technological advancement in the deposition technologies to further improve and tailor the coating properties. High power impulse magnetron sputtering (HIPIMS) offers additional flexibility for the deposition. Recent developments like the use of a positive reversal pulse serve as remote biasing, especially for insulating substrates.
This paper will discuss improvement of DLC coatings when using HIPIMS on different examples. The potential and properties of hard and smooth amorphous carbon coatings (t)a-C by the use of a HIPIMS-Arc mixed mode will be presented. For metal doped DLC (a-C:H:Me) examples will be given both, for tribological and sensor properties. The films are deposited either by unipolar HIPIMS or with additional positive reversal (kick) pulse.