Abstract:
Nanoelectronics has forever changed our way of life and how we interact in our businesses and personal lives. Consumer and business products designed using nanoscale technology are prevalent throughout numerous technology sectors including mobile/wireless, automotive, energy, industrial automation, security, and healthcare industries.
With the semiconductor industry continuing its extreme scaling of silicon devices and moving beyond CMOS in cutting-edge nanoelectronics devices, the introduction of new materials and novel devices that need innovative processing and assembly brings formidable metrology challenges. We are in an era where nanotechnology is driving us toward ever smaller and more complex devices that involve new physical principles. Innovative metrology and characterization methods are required for R&D and manufacturing efficiency.
So…… Enter the National Institute of Standards and Technology (NIST).
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Department of Commerce. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life. NIST carries out its measurement and standards mission through the NIST Laboratories, who conduct world-class research (often in close collaboration with industry) that advances the nation's technology infrastructure and helps U.S. companies continually improve products and services. NIST with its world-class staff and electrical, optical, and physical characterization capabilities lead in the development of these metrologies to accelerate the commercialization and manufacture of new nanoelectronic devices and technology. No other organization has the necessary combination of measurement expertise and reputation to deliver the needed measurement science. NIST is also a key contributor to the National Nanotechnology Initiative and has established a key partnership with the Nanoelectronics Research Initiative to help drive innovation for the next generation of computer chips. NIST contributes significantly to work on advanced materials, electronics, and optoelectronics.
In my talk, I will present an overview of the metrology and characterization challenges facing the semiconductor industry as well as opportunities. To illustrate these challenges and opportunities, various examples of NIST’s leading edge nanoelectronics metrologies will be presented and discussed. The presentation also provides a snapshot of some of the key work at NIST.