SEMICON West 2016

Production Test RF Calibration for Multi‐DUT Probe Cards: How to get the Most Accurate Measurements- Daniel Bock, Cascade Microtech (Room North Hall, Room 131)

12 Jul 16
3:20 PM - 3:40 PM

Tracks: Test Forum

Selected “Best Presentation, Tutorial in Nature” at SW Test 2016

Abstract:

During RF measurement in production environments the increased accuracy required for KGD test has been requiring RF calibration to the probe tip.  However, using commercially available single site Calibration Substrates has proven to be a limiting factor in yield, causing variation in site-to-site measurements.  This can be attributed to the un-controlled RF state of the non-measured channels interacting with the channels that are being measured.  In order to improve site-to-site variation, it is recommended that a true, multi-site calibration substrate be used to prevent unnecessary yield loss because of this variation.  We will present data that shows this variation, and how important it is too measurement.