Challenges in Designing Low-Cost Media-Isolated MEMS Pressure Transducers
(Room 204)
10 Jun 15
11:10 AM
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11:50 AM
Tracks:
MEMS, MEMS & Sensors
Media-isolated MEMS pressure sensors have been on the market since the 1970s. The majority of these snesors still rely on the 1970s technology, impeding the lowering of the cost of such sensors. The technology presented here overcomes this hurdle by eliminating the need for the oil fill and the mteal diaphragm. In this session, attendees will learn the technologies currently used in media-isolated pressure transducers, a new technology that enables the fabrication of low-cost media-isolated pressure transducers, and will learn the challenges and solutions in designing and fabricating a low-cost media-isolated pressure transducer that meets the tough requirements of HVAC/R applications.