SEMICON Europa 2016

MOTION SYSTEM DESIGN

MOTION SYSTEM DESIGN

XY table

XY table

This construction provides the simplest form of 2 linear degrees of freedom of a positioning system where the base of the top axis is screwed to the carriage of the lower axis.

  • Ironcore linear motors with reduced cogging
  • High precision linear encoder
  • High precision recirculating caged ball bearings, for stiffness and smooth running
  • External cable management system
Gantry system

Gantry system

This configuration has the best accessibility to the space around it per footprint of the machine. It is commonly used as single cell, or in process application where several machines are operating over a conveyor.

Gantry configuration, driven by linear motors and designed for high natural frequency, can provide an excellent solution that combines high precision, high speed and low settling time.

Rotary table

Rotary table

The rotary table's performance, which significantly exceed levels achieved with a conventional solution, is determined by the best integration of these elements:

  • High performance torque motor
  • Precision bearings
  • High precision rotary encoder
  • High rigidity mechanical structure