SEMICON Europa 2016

Cleanroom Robots from Kawasaki

Kawasaki Robotics at Semicon Europe in Grenoble

The Semicon Europe is the leading trade fair for the microelectronics industry in Europe. This year´s Semicon takes place in Grenoble, France from Oct. 25th to 27th.

Kawasaki Robotics, the leading Robot Manufacturer shows at this important trade fair three robots related to the microelectronics industry:

-the Clean Room Robots: NTS20 and RC005L.

-the dual-arm-scara Robot duAro.

The duAro is a brand-new Offering that realizes the Concept of an innovative Dual-Arm SCARA Robot into the microelectronics market.

The duAro is a robot with a new dual-armed structure that can fill needs for two-handed human labor with straightforward reproduction of the independent movement of two arms. It uses the simple horizontal movement of a SCARA and makes it dual-armed. It also features easy direct teaching, making the robot highly practical. Also, the robot body and controller are structured as a package on a wheeled base. This makes it easy to install and to relocate.

The robot can easily fit in the space of a human and perform the work a human would with two arms. With its collision detection function and the ability to move slower near humans for safety, it can be installed right beside workers to work together.

 

NTS20 is a robot out of the NT Series: The NT Series are special long reach horizontal arm Robots for Clean Rooms. These Robots are designed to give a single robot the reach to tend up to four FOUPs without using a linear axis.

EXEPTIONAL REACH: The NT series incorporates the next-generation design to handle either 300 mm or 450 mm wafers at a rate of 400 wafers per hour (WPH) without an aligner.

HIGH THROUGHPUT: The throughput of the standard NT robot is 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. An optional gripper is available that increases the throughput to 700 WPH.

SEMI F47 COMPLIANT: NT models instantaneously respond to electrical fluctuations, such as a drop in voltage, and automatically resume operation when voltage is restored.

SEMI S2 COMPLIANT: NT models meet specific considerations for environment and personal safety.

COLLISION DETECTION: Both software and hardware components are equipped with collision detection features to lessen the damage of delicate and specialized equipment caused by collisions.

CEILING MOUNT: The NT620 model features a ceiling mount specification design for use in a chemical liquid environment while meeting ISO Class 1 requirements.

The RC005L is a high speed, high performance industrial robot designs for Clean Room Environments. The robot has a cleanroom classification of FED Class 100, equivalent to ISO Class 5 cleanroom, and comes with an all alluminum arm cover, fluoro rubber outer seals and a chemical resistant epoxy paint finish.

The RC005L has a max. payload of 5 kg, a horizontal Reach of 903 mm, a vertical Reach of   1,484 mm. With a Repeatability of ±0.03 mm and a maximum Speed 9,300 mm/s this Robot is very fast.

About Kawasaki Robotics:

Kawasaki Robotics is the pioneer in industrial robotics. The first robot made in Japan was made by Kawasaki in 1969. Since then Kawasaki is one of the biggest and leading robot manufacturer worldwide and delivers innovative robots for every application.