The ATH-M pumps offer a gas throughput of over 5,000 sccm of nitrogen for non-heated applications. They also allow a very high throughput with up to 1,500 sccm of argon and a pump operating temperature of 65 °C in corrosive applications. The pumps operate at high temperatures up to 85 °C for use in the most aggressive applications with by-product deposition sensitive processes. These pumps include integrated drive electronics to ensure a small footprint and easy plug-and-play installation. The total height of the DN 320 flange model is less than 400 mm. Due to the new electronics; the pumps can be started and stopped within 8 minutes. Active magnetically levitated bearings and automatic out-of-balance compensation enable wear-free and low vibration operation of the ATH-M pumps. They are maintenance-free and require no lubrication. Continuous rotor stability is assured for reliable performance. Low power consumption at nominal speed and very low cooling water consumption (1 l/min) also characterize the new ATH-M pumps.