IntelLIDrives, Inc. released a new model of large aperture ultra-thin direct drive rotary tables (DDR) for large 300 mm semiconductor wafers ACR335UT.
This rotary table features:
Direct drive (DDR) technology
Resolution 0.2 arc-sec
Repeatability 0.5 arc-sec
Max speed 300 rpm
Center aperture 335 mm
Ultra-thin design 22 mm
The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.
Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
These features make the ACR-335UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
For addional information visit IntelLiDrives website