SEMICON West 2016

AIR BEARING XY PLANAR STAGES

IntelLiDrives Cartesian Planar XY Table offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY tables  where one axis is being carried by another. As a result, with the planar systems greater reliability and performance is realized through design simplification and elimination of wear-prone components.

 

Multi axes XY-Z-Rotary system integrates XY planar forcer with air bearing Lift-Rotary Stage. Planar  XY Table can operate in any orientation (side wall, upside-down) with multiple forcers installed and operated  independently on a single platen for high throughput and flexibility in many robotic automation applications.